看了復合氮化硼導電陶瓷鍍膜蒸發(fā)舟/鍍膜坩堝的用戶又看了
虛擬號將在 180 秒后失效
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性能特點 Performance
1.為解決鍍膜濺射爬堝問題及鎳、銅腐蝕問題而獨立開發(fā)的新型配方產(chǎn)品。
2.采用先進的配方工藝,優(yōu)化組分,化學穩(wěn)定性好,電阻率穩(wěn)定。
3.抗氧化性能好,抗金屬鋁,鎳,銅金等腐蝕。
4.**使用溫度1800度。
1. Independently developed new formula products in order to solve the problems of sputtering pot and nickel and copper corrosion.
2. Adopt advanced formulation technology, optimize components, have good chemical stability and stable resistivity.
3. Good oxidation resistance, resistant to aluminum, nickel, copper and gold corrosion.
4. The maximum using temperature is 1800 ℃.
?上一個: 半導體設備氮化硼絕緣配件 BN Insulation Parts for Semiconductor Equipment
性能指標 Performance Indexes
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